Massachusetts Soldiers & Sailors of the Revolutionary War is an amazing collection of data in 17 volumes arranged alphabetically by last name. You can find these online at Archive.org (free). Use these links to make it easy. Simply select the book the surname you are researching falls between.
VOL 1 - A to Ber
VOL 2 - Bes to Byx
VOL 3 - C to Cor
VOL 4 - Cos to Dr
VOL 5 - Du to Fo
VOL 6 - Fr to Gy
VOL 7 - Ha to Hi
VOL 8 - Hm to Jy
VOL 9 - Ka to Ls
VOL 10 - Lu to Mop (alternate link)
VOL 11 - Mor to Paz (alternate link)
VOL 12 - Pe to Ra
VOL 13 - Re to Se
VOL 14 - Sh to Sth
VOL 15 - Sti to Toz
VOL 16 - Tra to Whe
VOL 17 - Whi to Zyr (alternate link)